首頁收藏設為主頁

當前位置:首頁 > 產品與服務> 圖形化襯底

圖形化襯底WPSS

2014-09-02

2"WPSS

Inspection

Item

Detail

Spec

Description

SEM
Image
Inspection

Width

Average

5.40±0.40um





Unif.

5%

Height

Average

1.65±0.1um

Unif.

5%

OM Image
Inspection

C-plane

Average

0.55±0.25um

Unif.

5%

Scope Inspection

Pattern Link

Pattern Link

8ea

every pattern link should be counted

Pattern Missing

100um

8ea

pattern missing in a Circle area diameter:100umshould be judged as 1ea

Scratch

1.2mm

7ea

width60um and lenth1.2mm should be judged as 1ea
if the pattern link happenes in the nearest 20 patternes area from the scratch,the pattern link should not be counted

Edge Bead

Edge Bead

1.8mm

The pattern failed within the 1.8mm area from the wafer edge should not be counted
The non-pattern area should be less than1mm from the wafer edge

Abnormal Shape

Abnormal Shape

3%

Total area of abormal shape pattern should be less than 3%


香港马会白姐透码 河南快赢481遗漏查询 浙江福彩快乐12走势图 新疆35选7开奖结果查询82期 双色球投注技巧对角线 e族彩票苹果 天津时时彩 网络麻将都有什么平台 总进球数算不算加时赛 上海天天彩选4历史开奖 彩票的大数据分析软件 亲友258长沙麻将微信群 上海时时乐 0.1元一炮的捕鱼游戏 直销为什么不赚钱 广西快3遗漏号 海南环岛赛游戏开奖